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Characterization of Deep Dry Etching of Silicon Single Crystal by HDP

박우정, 김장현, 김용탁, 백형기, 서수정, 윤대호

J. Korean Ceram. Soc. 2002;39(6):570
DOI: https://doi.org/10.4191/kcers.2002.39.6.570

Cited By 1

Fabrication of Silicon Carbide Candle Filter and Performance Evaluation at High Temperature and Pressure

Sang-Hun Lee, Seung-Won Lee, Kee-Sung Lee, In-Sub Han, Doo-Won Seo, Seok-Joo Park, Young-Ok Park, Sang-Kuk Woo

J. Korean Ceram. Soc. 2002;39(5):503
DOI: https://doi.org/10.4191/kcers.2002.39.5.503

Cited By 1

Optical Properties and Structural Analysis of SiO₂ Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition

Sung-Min Cho, Yong-Tak Kim, Yong-Gon Seo, Hyung-Do Yoon, Young-Min Im, Dae-Ho Yoon

J. Korean Ceram. Soc. 2002;39(5):479
DOI: https://doi.org/10.4191/kcers.2002.39.5.479

Cited By 1

Near-Net-Shape Forming and Green Properties of Silicon Nitride by Direct Coagulation Casting Technique

Yun-Sung Jung, Cecile Pagnoux, Yeon-Gil Jung, Un-Gyu Paik

J. Korean Ceram. Soc. 2002;39(3):299
DOI: https://doi.org/10.4191/kcers.2002.39.3.299

Effect of Si/α-Si₃N₄ Ratio on the Shape of Silicon Nitride Particles Produced by SHS Method

Min-Sung Kim, Dong-Soo Park, Byung-Dong Han, Hai-Doo Kim, Chan Park

J. Korean Ceram. Soc. 2002;39(3):217
DOI: https://doi.org/10.4191/kcers.2002.39.3.217

Structural and Optical Properties of Porous Silicon Prepared by Electrochemical Etching

Jeong-Seok Lee, Nam-Hee Cho

J. Korean Ceram. Soc. 2002;39(2):109
DOI: https://doi.org/10.4191/kcers.2002.39.2.109

Cited By 2

Densification Behavior of Reaction-Bonded Silicon Nitride Prepared by Using Coarse Si Powders

이주신, 문지훈, 한병동, 박동수, 김해두

J. Korean Ceram. Soc. 2002;39(1):45
DOI: https://doi.org/10.4191/kcers.2002.39.1.045

Cited By 3

The Effect of RF Power and $SiH_4$/($N_2$O+$N_2$) Ratio in Properties of SiON Thick Film for Silica Optical Waveguide

김용탁, 조성민, 서용곤, 임영민, 윤대호

J. Korean Ceram. Soc. 2001;38(12):1150

Synthesis and Characterization of Silicon Substituted Hydroxyapatite

김수룡, 김영희, 정상진, 류도형

J. Korean Ceram. Soc. 2001;38(12):1132

Effects of $N_2O$/$SiH_4$Flow Ratio and RF Power on Properties of $SiO_2$Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition

조성민, 김용탁, 서용곤, 임영민, 윤대호

J. Korean Ceram. Soc. 2001;38(11):1037

Sintering and Mechanical Properties of Silicon Nitride Prepared with a Low-cost Silicon Nitride Powder

박우윤, 박동수, 김해두, 한병동

J. Korean Ceram. Soc. 2001;38(11):987

Simulation of Silicon Carbide Converted Graphite by Chemical Vapor Reaction (Ⅰ)

Joon-Sung Lee, Sung-Churl Choi

J. Korean Ceram. Soc. 2001;38(9):846

Effect of Raw-Si Particle Size on the Mechanical Properties of Sintered RBSN

이주신, 문지훈, 한병동, 박동수, 김해두

J. Korean Ceram. Soc. 2001;38(8):740

The Effect of La-silicon Oxynitride on the Densification of ${Si_3}{N_4}$ Ceramics by Spark Plasma Sintering

Kyeong-Sik Cho, Sungjin Kim, Sung-Ho Beak, Heon-Jin Park, June-Gunn Lee

J. Korean Ceram. Soc. 2001;38(8):687

Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (I): Deposition Behaviors of SiC with Deposition Parameters

김광호, 서지윤, 윤석영

J. Korean Ceram. Soc. 2001;38(6):531

Mechanical Properties of SiC-$Si_3$$N_4$Composites Containing $beta$-$Si_3$$N_4$Seeds

이영일, 김영욱, 최헌진, 이준근

J. Korean Ceram. Soc. 2001;38(1):22

Fabrication of Porous RBSC by Si Melt Infiltration

서기식, 박상환, 권혁보

J. Korean Ceram. Soc. 2000;37(11):1119

Preparation and Application of Fiber Composites made of Carbon Nanofibers and Carbide Nanofibers

임연수, 김기덕, 이재춘, 김명수, 김성수

J. Korean Ceram. Soc. 2000;37(6):569

Effects of Microstructural Change in Joint Interface on Mechanical Properties of Si3N4/S.S316 joint with Ni Buffer layer

장희석, 박상환, 권혁보, 최성철

J. Korean Ceram. Soc. 2000;37(4):381

Preparation and Characterization of Silicon Carbide Nanofiber

신현익, 송현종, 김명수, 임연수, 이재춘

J. Korean Ceram. Soc. 2000;37(4):376

A Study on Texture Development in Liquid-Phase Sintered Silicon Carbide

성한규, 조경식, 박노진, 최헌진, 이준근

J. Korean Ceram. Soc. 2000;37(4):320

Preparation of Silicon Carbide with Sialon

이종국, 박종곤, 이은구, 김환

J. Korean Ceram. Soc. 2000;37(3):247

Mechanical Properties of Hot-Pressed SiC with Rare-Earth Oxide

최철호, 이충선, 박광자, 조덕호, 김영욱

J. Korean Ceram. Soc. 2000;37(2):158

Effect of Si on Mechanical and Anti-oxidation Properties of Ti-Si-N Coating

박범희, 김정애, 이종영, 김광호

J. Korean Ceram. Soc. 2000;37(1):96

Tribological Properties of Hot Pressed $SiC/Si_3N_4$ Composites

백용혁, 최웅, 박용갑

J. Korean Ceram. Soc. 1999;36(10):1102

Microstructures and Mechanical Properties of SiC Containing $SiC_{platelet}$ Seeds of Various Size

최명제, 박찬, 박동수, 김해두

J. Korean Ceram. Soc. 1999;36(10):1094

Processing and Characterization of a Direct Bonded SOI using SiO$_2$ Thin Film

유연혁, 최두진

J. Korean Ceram. Soc. 1999;36(8):863

Mechanical Properties of Silicon Carbide-Silicon Nitride Composites Sintered with Yttrium Aluminum Garnet

이영일, 김영욱, 최헌진, 이준근

J. Korean Ceram. Soc. 1999;36(8):799

Microstructure and Mechanical Properties of Self-Reinforced Si3N4 Ceramic Prepared by Pressureless-Sintering

김완중, 이영규, 조원승, 최상욱

J. Korean Ceram. Soc. 1999;36(5):547

Mechanical Properties and Microstructures of Self-toughened Silicon Nitride Cermic Prepared by Microstructural Control

김완중, 이영규, 조원승, 최상욱

J. Korean Ceram. Soc. 1999;36(4):432

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